Chamber Cleaning NF3 Nitrogen Trifluoride for CVD Semiconductor Equipment

• Customization: Available
• CAS No.: 7783-54-2
• Formula: NF3
• Model NO.: NF3
• EINECS: 231-514-0
• Constituent: Nitrogen Trifluoride
• Grade Standard: Industrial Grade
• Chemical Property: Non-Flammable Gas
• Un Number: Un2451
• Hazard Class: 2.2
• Molecular Weight: 71.00 G/Mol
• Boiling Point: -129.06 ℃
• Supply Form: Cylinder Filled Gas
• Application: Semiconductor, Display, PV
• Transport Package: 47L /80L Seamless Steel Cylinder
• Specification: 99.9%, 99.99%, 99.996%
• Trademark: Shaohua/OEM
• Origin: China
• HS Code: 2804290000

Product Description

Product Description

Nitrogen Trifluoride (NF3) is a critical electronic-grade cleaning gas for the global semiconductor, flat-panel display, and photovoltaic industries. Kaimei's 5N (99.999%) Ultra-High Purity NF3 is specifically engineered for high-precision plasma etching and in-situ chamber cleaning. It is the preferred choice for major fabs manufacturing 3D NAND Flash, Logic Chips, and High-Resolution LCD/OLED Panels due to its superior etching rate and environmental efficiency compared to traditional cleaning agents.
 

Core Advantages

 Ultralow impurity control:Strict control of moisture, CF4 N2 O2+Ar impurities, match semiconductor advancedprocess requirement, avoid particle pollution inside chamber 
High cleaning & etching efficiency:Excellent dissociation performance under remote plasma, fast remove Si3N4, SiO2, tungstenbased deposition residues, shorten equipment downtime

 Stable supply capacity:Shandong Shaohua Gas supports industrial grade / electronic grade multiple purity grades, flexible cylinder packaging & bulk supply solution 
Full set compliance documents:Provide MSDS, batch test report, shipping document, support CE related export certification for global market

NF3 purity (Vol.%)	≥99.9	≥99.99	≥99.996
CF4 (ppm)	≤500	≤100	≤20
N2 (ppm)	≤500	≤10	≤5
O2+Ar (ppm)	≤500	≤10	≤3
CO (ppm)	≤10	≤5	≤1
H2O (ppm)	≤5	≤2	≤1

Physical property

Molecular Weight:71.00;Boiling point:-129.06℃;Boiling point:-206.79℃

Application Fields

Semiconductor manufacturing:CVD/ALD chamber remote plasma cleaning, silicon-based material plasma etching for wafer fabs
Flat-panel display & LED:TFT-LCD / OLED production cavity cleaning
Photovoltaic industry:Thin-film solar cell etching & chamber cleaning
Advanced industry:High-energy chemical laser fluorine source, special fluorination process

Package & Delivery

Packaging:High-pressure seamless steel cylinder, 47L / 80L / 440L large container, customized filling weight available
Valve:Special corrosive-resistant valve
Shipping:Dangerous goods sea/air shipment, steel frame reinforced packing for long-distance ocean transport
Lead time:15-25 working days upon deposit
Service:Supply MSDS, COA batch analysis report, dangerous-goods shipping document

About Us — Shandong Shaohua Gas Co., Ltd.

Shandong Shaohua Gas Co., Ltd. is a professional industrial & specialty gas exporter located in Yantai, Shandong China, with branch office in Qingdao.
We focus on full-range gas product & gas equipment solution: bulk industrial gas, high-purity gas, electronic specialty gas including NF3, SF6, WF6, rare gas, calibration standard gas, together with cryogenic storage tank, vaporizer, PSA/VPSA gas generator, pressure-reducing skid and gas pipeline engineering service.
Our factory & laboratory passed ISO9001 quality management system certification, 3A enterprise credit evaluation. We have rich experience serving aerospace, semiconductor, new-energy, petrochemical, metallurgy sectors, have exported to Southeast Asia, Middle East, Central Asia, Africa and other global markets.
We provide one-stop service: product selection, technical consultation, export document support, after-sales online technical guidance. We welcome global distributors, semiconductor manufacturers, EPC engineering contractors for long-term win-win cooperation.